It is now fully appreciated that metrology will play an integral role in the successful development and commercialisation of micro- and nanotechnology. This talk will briefly describe the background of the research into engineering nanometrology at NPL, concentrating on the technical details of the projects.
Projects include the development of traceable instrumentation to measure areal surface topography, very low forces and micro-scale geometry.
Professor Richard Leach is a Principal Research Scientist at the National Physical Laboratory and looks after the nanometrology area. He is also a visiting professor at Loughborough University.