Steady demand for vacuum systems, as emerging technologies place demand on suppliers (LED, PV, Sensors), continues to drive the development of instrumentation for testing the vacuum environment.
RGAs, based on a quadrupole mass spectrometer, are the classic measuring instrument for evaluating for leaks and residual gas composition in a vacuum system. They are used in high vacuum applications such as research chambers, surface science research systems, accelerators, scanning microscopes, microelectronics fab, etc.
The same quadrupole mass spectrometers are extensively used as instruments to provide quantitative analysis in systems and to control processes like physical and chemical vapour deposition, etch, etc. RGAs are, however, difficult to calibrate and there is currently no traceability to any national primary standard.
In addition to the presentation of recent innovations in RGA technology and calibration, this meeting will drive the industry towards the establishment of a reasonable traceable calibration scheme for mass spectrometers.